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Proceedings Paper

Experience With The In Situ Monitor System For The Fabrication Of X-Ray Mirrors
Author(s): Eberhard Spiller
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Paper Abstract

Practical consideration for the fabrication of multilayer x-ray mirrors using in situ monitoring of the reflectivity for soft x-rays during deposition are discussed.

Paper Details

Date Published: 6 May 1985
PDF: 11 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949689
Show Author Affiliations
Eberhard Spiller, IBM T. J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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