Share Email Print

Proceedings Paper

Physical And Chemical Characterization Of Multilayered Structures
Author(s): J. M. Thorne; L. V. Knight; B. G . Peterson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

It is important to know the physical and chemical properties of a multilayer if its performance is to be compared to theoretical predictions, or if guidance is needed for the production of superior multilayers. Accurate, nondestructive analytical methods, such as neutron activation analysis, are restricted to certain elements. Certain destructive methods, such as total carbon analysis by combustion, can be sensitive enough for use with very small samples. The method of choice depends upon sensitivity and specificity, both of which are discussed in this paper.

Paper Details

Date Published: 6 May 1985
PDF: 4 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949685
Show Author Affiliations
J. M. Thorne, Brigham Young University (United States)
L. V. Knight, Brigham Young University (United States)
B. G . Peterson, Brigham Young University (United States)

Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

© SPIE. Terms of Use
Back to Top