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Proceedings Paper

Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating
Author(s): Eberhard Spiller; Alan E. Rosenbluth
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Paper Abstract

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multilayer with many layers at short wavelengths.

Paper Details

Date Published: 6 May 1985
PDF: 17 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949671
Show Author Affiliations
Eberhard Spiller, IBM T. J. Watson Research Center (United States)
Alan E. Rosenbluth, IBM T. J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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