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Proceedings Paper

The Characterization Of Multilayers Analyzers - Models And Measurements
Author(s): B. L . Henke; J. Y. Uejio; R. E. Tackaberry; H. T. Yamada
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Paper Abstract

A procedure is described for the detailed characterization of multilayer analyzers which can be effectively applied to their design, optimization and application for absolute x-ray spectrometry. An accurate analytical model has been developed that is based upon a simple modification of the dynamical Darwin-Prins theory to extend its application to finite multilayer systems. Its equivalence to the optical E&M solution of the Fresnel equations at each interface is demonstrated by detailed calculation comparisons for the reflectivity of a multilayer throughout the angular range of incidence of 0 to 90° . A special spectrograph and experimental method is described for the measurement of the absolute reflectivity characteristics of the multilayer. The experimental measurements at three photon energies in the 100-2000 eV region are fit by the analytical modified Darwin-Prins equation (MDP) for I( 0), generating a detailed characterization of two "state of the art" multilayers, a sputtered tungsten-carbon of 2d 21 70 A and a molecular lead stearate of 2d 100 A. The fitting parameters that are determined in this procedure are applied to help establish the structural characteristics of the particular multilayer.

Paper Details

Date Published: 6 May 1985
PDF: 15 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949669
Show Author Affiliations
B. L . Henke, Center for X-Ray Optics (United States)
J. Y. Uejio, Center for X-Ray Optics (United States)
R. E. Tackaberry, Center for X-Ray Optics (United States)
H. T. Yamada, Center for X-Ray Optics (United States)

Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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