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Proceedings Paper

Sputter Deposited Multilayer V-UV Mirrors
Author(s): Felix E. Fernandez; Charles M. Falco
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Paper Abstract

The design and fgbrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 A radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.

Paper Details

Date Published: 6 May 1985
PDF: 6 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949668
Show Author Affiliations
Felix E. Fernandez, University of Arizona (United States)
Charles M. Falco, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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