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Proceedings Paper

F-beam Evaporated Multilayer Soft X-ray Coatings, Analyzed With Cu-K Radiation
Author(s): M. P. Bruijn; P. Chakraborty; H. van Essen; J. Verhoeven; M . J. van der Wiel; W. J. Bartels
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Paper Abstract

Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.

Paper Details

Date Published: 6 May 1985
PDF: 13 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949667
Show Author Affiliations
M. P. Bruijn, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
P. Chakraborty, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
H. van Essen, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
J. Verhoeven, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
M . J. van der Wiel, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
W. J. Bartels, Philips Research Laboratories (The Netherlands)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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