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Proceedings Paper

Thin Films And Gratings: Theories Used To Optimize The High Reflectivity Of Mirrors And Gratings For X-Ray Optics
Author(s): B. Vidal; P. Vincent; P. Dhez; M. Neviere
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Paper Abstract

Near normal incidence is necessary to design low aberrations X-Ray systems. High reflectivity may be obtained with suitable multilayers deposited on gratings. Classical thin film theories previously used for analysis and synthesis of dielectric multilayers for the visible spectral region are applied in this paper in the UV and soft X-ray range. The optimal multilayer determined by these methods can be deposited onto a grating in order to increase its efficiency. For incidence angles lower than 40; and low wavelength-to-groove-spacing ratios, the efficiency of the total system may be predicted with a scalar theory. Then, the reflectivity is the product of the efficiency red on a universal grating efficiency curve by the multilayer reflectivity. Results will be given for several gratings geometries and various multilayers.

Paper Details

Date Published: 6 May 1985
PDF: 8 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949661
Show Author Affiliations
B. Vidal, University of Aix-Marseille III (France)
P. Vincent, University of Aix-Marseille III (France)
P. Dhez, University of Paris-sud (France)
M. Neviere, University of Paris-sud (France)

Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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