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Proceedings Paper

X-Ray microscope using multilayer optics with a laser-produced plasma source
Author(s): J. A. Trail; R. L. Byer
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Paper Abstract

All present X-ray microscopes involving focusing optics use synchrotrons as their source of soft X-rays. We describe our design and development to date of a scanning microscope which uses normal incidence multilayer mirrors in a Schwarzschild configuration to focus soft X-rays from a laser produced plasma to a spot diameter of less than 1000A. We compare the expected flux for this microscope with the fluxes expected and achieved by other investigators. The alignment tolerances for the objective were determined by raytracing. These tolerances and proposed means of achieving them will be discussed.

Paper Details

Date Published: 6 May 1985
PDF: 8 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949656
Show Author Affiliations
J. A. Trail, Stanford University (United States)
R. L. Byer, Stanford University (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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