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Proceedings Paper

Thermal Stability of W/C Multilayer Films
Author(s): Yasuo Takagi; Steven A. Flessa; Keith L. Hart; David A. Pawlik; Alan M. Kadin
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Paper Abstract

W(10A)/C(40A), W(15A)/C(15A) and W(40A)/C(10A) periodic multilayer films were prepared by magnetron sputtering and subsequently annealed at 730°C. The resulting change of the layered and crystal structures was studied by X-ray diffraction. The resulting structures largely depended on the thickness ratio of W to C. For example, in the W(15Å)/C(15Å) sample a-W as formed without any peaks of carbon crystals; in W(40Å) C(10Å)only W2C (orthorhombic) peaks appeared.

Paper Details

Date Published: 6 May 1985
PDF: 6 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949653
Show Author Affiliations
Yasuo Takagi, Ovonic Synthetic Materials Company (United States)
Steven A. Flessa, Ovonic Synthetic Materials Company (United States)
Keith L. Hart, Ovonic Synthetic Materials Company (United States)
David A. Pawlik, Ovonic Synthetic Materials Company (United States)
Alan M. Kadin, Ovonic Synthetic Materials Company (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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