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Proceedings Paper

Automatic deposition of multilayer X-ray coatings with laterally graded d-spacing
Author(s): M. P. Bruijn; P. Chakraborty; H. van Essen; J. Verhoeven; M. J. van der Wiel
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Paper Abstract

A computer controlled e-beam evaporation system is described, which allows fully automated production of soft X-ray reflection coatings with laterally graded d-spacing. Thickness control is done by measurement of the soft X-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer controlled movement of shutters. A result is given for automatic deposition of a multilayer coating.

Paper Details

Date Published: 6 May 1985
PDF: 8 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949649
Show Author Affiliations
M. P. Bruijn, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
P. Chakraborty, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
H. van Essen, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
J. Verhoeven, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
M. J. van der Wiel, FOM-Institute for Atomic and Molecular Physics (The Netherlands)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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