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Proceedings Paper

Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)
Author(s): R. A. House; R . D. Petty; J. J. Johnston; B. R. Key; G. J. Denton
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Paper Abstract

The GEMASIS is an automated device for general characterization of diffraction and surface scatter. Samples can be measured for out-of-plane as well as for in-plane incidence conditions. In-plane characterization includes angle-resolved measurements of scatter and diffraction orders. The device is described and typical data are shown.

Paper Details

Date Published: 10 May 1986
PDF: 12 pages
Proc. SPIE 0560, Diffraction Phenomena in Optical Engineering Applications, (10 May 1986); doi: 10.1117/12.949615
Show Author Affiliations
R. A. House, Rockwell International Corporation (United States)
R . D. Petty, Rockwell International Corporation (United States)
J. J. Johnston, Rockwell International Corporation (United States)
B. R. Key, Rockwell International Corporation (United States)
G. J. Denton, Rockwell International Corporation (United States)


Published in SPIE Proceedings Vol. 0560:
Diffraction Phenomena in Optical Engineering Applications
Dale M. Byrne; James E. Harvey, Editor(s)

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