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Proceedings Paper

Calibration Of Optical And Mechanical Sensors By X-Ray Interferometry
Author(s): Peter Becker; Peter Seyfried
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Paper Abstract

In a scanning x-ray interferometer cut from a silicon crystal the fringe period is equal to the lattice spacing selected (about 0.2 nm), which is well known in the unit of length. It is a practical instrument for high resolution measurements of small displacements, such as occur in investigations of high quality optical surfaces. In combination with an optical interferometer its fine scale having atomic distances as graduation marks, can be used for testing and for calibrating conventional interpolation techniques.

Paper Details

Date Published: 11 April 1989
PDF: 6 pages
Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949457
Show Author Affiliations
Peter Becker, Physikalisch-Technische Bundesanstalt (Federal Republic of Germany)
Peter Seyfried, Physikalisch-Technische Bundesanstalt (Federal Republic of Germany)


Published in SPIE Proceedings Vol. 1015:
Micromachining Optical Components and Precision Engineering
Peter Langenbeck, Editor(s)

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