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Proceedings Paper

Moire Deflectometry - A Ray Tracing Alternative To Interferometry
Author(s): Eliezer Keren; Kathi Kreske; Oded Kafri
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Paper Abstract

Moire deflectometry is a versatile technique for measuring various properties of surfaces and transparent objects. The applications of the method to surface analysis include measurements of flatness, roughness, and in-plane and out-of-plane distortions. A microscope mode allows the detection and measurement of scratches and other imperfections. The sensitivity of the instrument is tunable from the millimetric to the interferometric range by a simple mechanical adjustment. This allows the matching of the fringe increment to any desired specification. The deflectometer is highly immune to mechanical shock and vibrations, a feature that allows it to be placed on the production floor. Flat and spherical surfaces may be analyzed in situ in real time. An IBM PC AT compatible computer software package displays contour maps of surface topography, slopes, curvature, roughness, etc.

Paper Details

Date Published: 11 April 1989
PDF: 5 pages
Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949452
Show Author Affiliations
Eliezer Keren, Rotlex Optics Ltd. (Israel)
Kathi Kreske, Rotlex Optics Ltd. (Israel)
Oded Kafri, Rotlex Optics Ltd. (Israel)


Published in SPIE Proceedings Vol. 1015:
Micromachining Optical Components and Precision Engineering
Peter Langenbeck, Editor(s)

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