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Proceedings Paper

Interferometric Monitoring Of Spindle And Workpiece On An Ultra-Precision Single-Point Diamond Facing Machine
Author(s): A. E. Gee; S. G. McCandlish; K. E. Puttick
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Paper Abstract

Investigations, using a two-axis vertical-spindle single-point diamond tool lathe to study the facing of discs, showed that, in order to establish and control conditions for cuts approaching 100nm, it was necessary to monitor the spindle for transient run-out and longer-term growth and to measure in-process the orientation of the work-face. Accordingly, an optical (Fizeau) interferometer was incorporated in alignment with the spindle so that orientation and axial motion of the face-plate and/or the work-piece could be observed and recorded and the measured data used for correction. Special requirements and problems associated with using an interferometer to monitor the 'dynamic planarity' of a rotating surface are addressed; instrumental considerations are discussed and results described.

Paper Details

Date Published: 11 April 1989
PDF: 7 pages
Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949450
Show Author Affiliations
A. E. Gee, Cranfield Institute of Technology (UK)
S. G. McCandlish, University of Exeter (UK)
K. E. Puttick, University of Surrey (UK)

Published in SPIE Proceedings Vol. 1015:
Micromachining Optical Components and Precision Engineering
Peter Langenbeck, Editor(s)

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