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Proceedings Paper

In Process Interferometry By Real-Time Fringe-Analysis
Author(s): Bernd Breuckmann; Peter Langenbeck
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Paper Abstract

Interferometric measuring techniques are more and more used for the inspection of mechanical components with "quasi optical" properties. This paper presents a computer-aided interferometric measuring system for measuring optical as well as "non-optical" components.The specifications of the system are discussed, the field of application is demonstrated by various examples of industrial use. In addition to several applications in the field of interferometric investigations of components with reduced sensitivity ( wafers, masks, optical disks, ceramics, etc ), examples for the use of scan interferometry are presented. Scan interferometry allows the measurement of mechanical components with dimensions greater than the field of view of the interferometer. This can be achieved by the combination of interferometric measuring technique with ultraprecision mechanical positioning.

Paper Details

Date Published: 11 April 1989
PDF: 5 pages
Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949446
Show Author Affiliations
Bernd Breuckmann, Labor fur Technische Optik und Bildverarbeitung (Germany)
Peter Langenbeck, Ing.-Agentur fur Neue Technologie in Optik und Precision Engineering (Germany)

Published in SPIE Proceedings Vol. 1015:
Micromachining Optical Components and Precision Engineering
Peter Langenbeck, Editor(s)

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