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Proceedings Paper

Integrated Optical Interferometer On Silicon Substrates
Author(s): W. Gleine; J. Muller
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Paper Abstract

Integrated optical components like directional couplers, Y-junctions, mirrors and polarizers have been realized to generate an integrated optical Michelson interferometer on silicon substrates. A good quality waveguide material with reasonable low attenuation (below 0.5 dB/cm at λ = 632.8 nm for filmwaveguides ) a uniformity better than 3% and an adjustable refractive index between 1.46 and 2 is the LPCVD deposited siliconoxinitride , which can be trimmed by thermal annealing (▵n up to 2%, ▵d = 2-10%). The basic geometry of the components is a strip loaded waveguide, which has been obtained by photolithography and plasma-etching. The losses of such waveguides due to surface scattering were about 1 dB/cm for monomode waveguiding at λ=632.8 nm.

Paper Details

Date Published: 5 April 1989
PDF: 0 pages
Proc. SPIE 1014, Micro-Optics, (5 April 1989); doi: 10.1117/12.949415
Show Author Affiliations
W. Gleine, Technische Universitat Hamburg Harburg (Germany)
J. Muller, Technische Universitat Hamburg Harburg (Germany)

Published in SPIE Proceedings Vol. 1014:
Anna Maria Verga Scheggi, Editor(s)

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