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Proceedings Paper

Effect Of Grating Positional Error On Moire Signal Contrast
Author(s): Chang-ming Ma; Xing-qing Dai
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Paper Abstract

This paper presents the effect of the positional error of metrological gratings on the contrast of Moire signals. The relationship between the positional error and the Moire fringe curvature has been discussed under different gap conditions. Theoretical expressions for the contrast of Moire signals have been deduced by means of geometrical approximation and diffraction principles. Agreement between the experimental results and the theoretical analysis is extremely good.

Paper Details

Date Published: 10 March 1989
PDF: 8 pages
Proc. SPIE 1012, In-Process Optical Measurements, (10 March 1989); doi: 10.1117/12.949335
Show Author Affiliations
Chang-ming Ma, Imperial College of Science, Technology and Medicine (United Kingdom)
Xing-qing Dai, Shanghai Institute of Mechanical Engineering (China)

Published in SPIE Proceedings Vol. 1012:
In-Process Optical Measurements
Kenneth H. Spring, Editor(s)

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