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Proceedings Paper

Investigation Of Optical Surfaces With A New, Automated Ellipsometer Arrangement
Author(s): Michael Linder
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Paper Abstract

The new automatic PSZ-ellipsometer to be presented here is derived from known PSA/PSCA-arrangements. The usage of a double-beam polarizer for analyzing the reflected beam and of a new evaluation technique allow the compensation of main error sources. With the absolutely necessary optical elements only, our concept allows measurements with high precision, although a quasidynamic method is used. The actually presented realization is designed for measurements at multiple angles of incidence and wavelengths (MAI spectroscopic ellipsometry). The measuring process is dynamically computer guided for optimum performance. Our application is mainly the investigation of surface layers, not only for evaporated thin film coatings, but also for surface modifications due to polishing or cleaning processes. Instant experimental tests gave errors much less than 0.001 in refractive index and *lnm in film thickness while measuring MgF2 films on BK 7 glass. Investigations of "polishing films" resolved differen-ces in refractive indices between surface and substrate of only 0.0018 *0.0004 on BK 7 glass.

Paper Details

Date Published: 10 March 1989
PDF: 5 pages
Proc. SPIE 1012, In-Process Optical Measurements, (10 March 1989); doi: 10.1117/12.949327
Show Author Affiliations
Michael Linder, Optisches Institut der TU Berlin (Germany)


Published in SPIE Proceedings Vol. 1012:
In-Process Optical Measurements
Kenneth H. Spring, Editor(s)

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