Share Email Print

Proceedings Paper

Silicon Microresonator Transducers
Author(s): Brian Culshaw
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Optically energised microresonant transducers offer a potentially simple and precise means for implementing fibre optic measurements. In this paper, the principles of such transducers are briefly reviewed. This is followed by a summary of the experimental data and theoretical insights gained over the past few years in applying such transducers to the measurement of pressure and temperature. Factors such as the condition for self-excitation, the transient responses, materials characteristics and systems implications are briefly discussed, in addition to the direct characterisation of experimental sensors. The paper demonstrates that this approach to fibre optic measurements is compatible with simple remotely energised, relatively high precision measurement applications and, furthermore, that the technique can be readily applied to multiple sensor arrays and systems.

Paper Details

Date Published: 23 February 1989
PDF: 6 pages
Proc. SPIE 1011, Fiber Optic Sensors III, (23 February 1989); doi: 10.1117/12.949314
Show Author Affiliations
Brian Culshaw, University of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 1011:
Fiber Optic Sensors III
Ralf Th. Kersten, Editor(s)

© SPIE. Terms of Use
Back to Top