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Proceedings Paper

Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection
Author(s): Gilles Grand; Michel Darboux; frederic Moisan
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Paper Abstract

This optimisation method is based on the well-known effect of reflectance variation as a function of wavelength, for thin film structures. Wavelength spectra acquisition for the various structures are basic data of an adapted wavelength filter calculation. Both this calculation and an original optical apparatus allow implementation in a fully automated integrated circuits inspection machine. We present photometric measurements attesting of method reliability, and final inspection results on images with defects, showing improvement that contrast optimisation can bring.

Paper Details

Date Published: 15 February 1989
PDF: 7 pages
Proc. SPIE 1010, Industrial Inspection, (15 February 1989); doi: 10.1117/12.949247
Show Author Affiliations
Gilles Grand, Commissariat a  l'Energie Atomique (France)
Michel Darboux, Commissariat a  l'Energie Atomique (France)
frederic Moisan, Commissariat a  l'Energie Atomique (France)


Published in SPIE Proceedings Vol. 1010:
Industrial Inspection
Donald W. Braggins, Editor(s)

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