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Proceedings Paper

Photon Tunneling Microscopy
Author(s): John M. Guerra
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Paper Abstract

An evanescent field arising from photons tunneling through a total internal reflection boundary is employed as a high vertical resolution (less than 1 nm, detector-limited) height transducer which maps sample microtopography into a grayscale imagespace. A video densitometer and xyz oscilloscope restore the grayscale image to a 3D topographic image; restoration and viewing perspective manipulation are real-time. Depth of field is about 1 µm and lateral resolution is typical to an oil immersion microscope (about 0.4 µm).

Paper Details

Date Published: 21 March 1989
PDF: 10 pages
Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949177
Show Author Affiliations
John M. Guerra, Polaroid Corp. (United States)

Published in SPIE Proceedings Vol. 1009:
Surface Measurement and Characterization
Jean M. Bennett, Editor(s)

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