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Proceedings Paper

Comparison Of Optical Scatterometer And Profilometer Techniques For Characterizing Smooth Surfaces
Author(s): R. D. Jacobson; S. R. Wilson; G. A. Al-Jumaily; J. R. McNeil; J. M. Bennett; L. Mattsson
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Paper Abstract

Several techniques are available for characterizing the surface microstructure of smooth components. Often it is necessary to compare the results from two or more of these techniques. This can lead to problems unless it is understood that all measurement techniques are bandwidth limited, and each technique has a characteristic transfer function. We will discuss several techniques in this regard, including the optical profilometer (WYKO), the optical scatterometer (both angle-resolved and TIS), and the mechanical profilometer (Talystep). A number of samples having different microstructure properties were characterized using these techniques, and results will be discussed.

Paper Details

Date Published: 21 March 1989
PDF: 5 pages
Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949158
Show Author Affiliations
R. D. Jacobson, University of New Mexico (United States)
S. R. Wilson, University of New Mexico (United States)
G. A. Al-Jumaily, University of New Mexico (United States)
J. R. McNeil, University of New Mexico (United States)
J. M. Bennett, Naval Weapons Center (United States)
L. Mattsson, Institute of Optical Research (Sweden)

Published in SPIE Proceedings Vol. 1009:
Surface Measurement and Characterization
Jean M. Bennett, Editor(s)

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