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Proceedings Paper

Monolithic Fabry-Perot Structure For Soft X-Rays
Author(s): Felix E. Fernandez; C. Riedel; A. Smith; B. Edwards; B. Lai; F. Cerrina; Martin J. Carr; A. D. Romig; J. Corno; L. Nevot
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Paper Abstract

The design, fabrication, and preliminary characterization and test results for reflection Fabry-Perot etalon structures operating with soft X-rays is described. The etalons were designed for maximum performance near normal incidence and for 125 Å radiation, close to the silicon L absorption edge. The structures were fabricated with a dc sputtering technique and consist of two molybdenum/silicon multilayers separated by a silicon spacer. The samples have been characterized by several complimentary methods and reflectivity measurements have been made using synchrotron radiation. The reflectance has a sharp maximum (27%) for 124 Å light incident at 10o from normal. Interference effects between the two reflectors, through the spacer, are clearly demonstrated.

Paper Details

Date Published: 16 December 1988
PDF: 7 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948795
Show Author Affiliations
Felix E. Fernandez, University of Puerto Rico (United States)
C. Riedel, University of Wisconsin (United States)
A. Smith, University of Wisconsin (United States)
B. Edwards, University of Wisconsin (United States)
B. Lai, University of Wisconsin (United States)
F. Cerrina, University of Wisconsin (United States)
Martin J. Carr, Sandia National Laboratories (United States)
A. D. Romig, Sandia National Laboratories (United States)
J. Corno, Universite de Paris XI (France)
L. Nevot, Universite de Paris XI (France)

Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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