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Proceedings Paper

Measurements Of X-Ray Surface Scattering And Diffraction Properties Of Selected Multilayers
Author(s): A. Hornstrup; F. E. Christensen; J L. Wood; M. Bending; H W. Schnopper
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Paper Abstract

We present measurements of X-ray scattering from various substrates, from W/Si and W/C multilayers deposited on ordinary and superpolished substrates and diffraction measurements from these multilayers. We find no significant change in scatter after deposition of the multilayer in the cases with ordinary substrates, but there is some evidence of surface smoothing in one case with superpolished fused quartz as substrate. The measurements show that multilayers deposited on conventional Si-substrates have a mosaicity which is correlated with the scattering measurements. This correlation, however, is not found for multilayers on supersmooth substrates. Reflectivity-and Darwin curve measurements show that a well defined d-spacing is obtained in all cases. There is, however, an interesting difference between multilayers on supersmooth substrates and on ordinary substrates which cannot be explained by conven-tional imperfections.

Paper Details

Date Published: 16 December 1988
PDF: 14 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948785
Show Author Affiliations
A. Hornstrup, Danish Space Research Institute (Denmark)
F. E. Christensen, Danish Space Research Institute (Denmark)
J L. Wood, Ovonic Synthetic Materials Co (United States)
M. Bending, Ferranti-Astron (U.K)
H W. Schnopper, Danish Space Research Institute (Denmark)


Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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