Share Email Print
cover

Proceedings Paper

Optimum Design Method Of Multilayer Elements
Author(s): Masaki Yamamoto; Shigeru Nakayama; Takeshi Namioka
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new design method for soft X-ray multilayers is presented. The method utilizes a recurrence formula for the complex amplitude reflectance of a multilayer and its graphical representation in the Gaussian plane. The design procedure gives a clear insight into the evolution of the complex amplitude reflectance of a multilayer at every stage of the deposition as the multilayer builds up. The thickness of each layer is optimized layer by layer so as to attain the highest possible reflectance for a given set of coating materials with the minimum number of layers. Some examples are given to demonstrate the usefulness of the present method in the design of multilayer elements for soft X-rays.

Paper Details

Date Published: 16 December 1988
PDF: 6 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948783
Show Author Affiliations
Masaki Yamamoto, Tohoku University (Japan)
Shigeru Nakayama, Tohoku University (Japan)
Takeshi Namioka, Tohoku University (Japan)


Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

© SPIE. Terms of Use
Back to Top