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Proceedings Paper

Overview Of Japanese Multilayer Research
Author(s): Takeshi Namioka
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Paper Abstract

The present status of studies on soft X-ray multilayers in Japan is briefly reviewed. This includes the design concepts, optical constants of substrates and thin films, fabrication techniques, evaluation methods, and some applications.

Paper Details

Date Published: 16 December 1988
PDF: 9 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948779
Show Author Affiliations
Takeshi Namioka, Tohoku University (Japan)


Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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