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Proceedings Paper

A New X-Ray Reflectometer
Author(s): J. Corno; B. Pardo; A Raynal
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Paper Abstract

A new modular set grazing goniometer, using commercial components, for characterization of thin films or stacks is described.

Paper Details

Date Published: 16 December 1988
PDF: 5 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948778
Show Author Affiliations
J. Corno, Institut D'optique (France)
B. Pardo, Institut D'optique (France)
A Raynal, Institut D'optique (France)

Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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