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Proceedings Paper

The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors
Author(s): B L Evans; J. Al-Dabbagh; B J. Kent
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Paper Abstract

The reflectivities of plane Pt-Si multilayer mirrors of various d-spacings and layer thickness ratios have been measured as a function of angle at wavelengths within the soft X-ray and EUV regions. The measured performance is compared with theory and the effect of heat treating the mirrors interpreted in terms of Pt film agglomeration. The imaging characteristics of a concave Pt-Si multilayer mirror are presented.

Paper Details

Date Published: 16 December 1988
PDF: 7 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948776
Show Author Affiliations
B L Evans, University of Reading (U.K.)
J. Al-Dabbagh, University of Reading (U.K.)
B J. Kent, SERC Rutherford Appleton Laboratory (U.K.)

Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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