Share Email Print

Proceedings Paper

Multilayer Characterization At LPARL
Author(s): D. L. Windt; R. C. Catura
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe a new facility for characterization of the XUV optical performance of multilayer reflectors. Samples are loaded into an ultra-high vacuum, computer-controlled reflectometer consisting of in-vacuum stepper motor translation and rotation stages with relative positioning accuracies of 1µm and 0.1 mdeg, respectively. The reflectometer is used with a laboratory light source which provides collimated, monochromatic radiation from approximately 1800 Å to < 8 Å. The reflectometer is also easily transported for use with synchrotron radiation. Reflectance measurements, using a variety of detectors, can be made from grazing incidence to near-normal incidence, and the reflectometer can be rotated from horizontal to vertical while under vacuum in order to perform polarization-sensitive measurements. In addition to characterizing multilayer reflectors fabricated in our laboratory, the apparatus is well suited for the determination of optical constants using the reflectance versus incidence angle method.

Paper Details

Date Published: 16 December 1988
PDF: 7 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948773
Show Author Affiliations
D. L. Windt, Lockheed Palo Alto Research Lab (United States)
R. C. Catura, Lockheed Palo Alto Research Lab (United States)

Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

© SPIE. Terms of Use
Back to Top