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Proceedings Paper

Multilayer X-Ray Mirrors; The State Of The Art.
Author(s): M P Bruijn; J. Verhoeven; E. Puik; M J van der Wiel
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Paper Abstract

A review is given of the techniques to produce multilayer coatings for soft X-ray reflection. Current work of the improvements of the energy resolution of these systems is described. The state of the art in the production of imaging objectives is reviewed.

Paper Details

Date Published: 16 December 1988
PDF: 10 pages
Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948770
Show Author Affiliations
M P Bruijn, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
J. Verhoeven, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
E. Puik, FOM-Institute for Plasma Physics (The Netherlands)
M J van der Wiel, FOM-Institute for Plasma Physics (The Netherlands)


Published in SPIE Proceedings Vol. 0984:
X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers
Finn Erland Christensen, Editor(s)

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