Proceedings PaperTheoretical Issues In Amorphous-Silicon Materials And Device Research
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
The characterization necessary to account for the physical properties and device performance of any semiconducting material is presented. This can be divided into five major categories. The results of intensive studies of hydrogenated amorphous silicon thin films are reviewed in detail. It is concluded that many important characteristics of these commercially important materials are still not known with any degree of certainty.