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Proceedings Paper

Ellipsometric Characterization Of Optical Constants For Transparent Materials
Author(s): S. F Nee; H E Bennett
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Paper Abstract

Ellipsometric parameters v and A for glass samples were measured at multiple angles of incidence using an infrared ellipsometer in the null mode. The Fresnel equations were fit to the data using a least-square-fit program to minimize both random and systematic errors in the measurements of the complex optical constants. A fused silica sample with roughness of 0.5 nm rms was used to test the system. The deviations of v and A from theory are at the level of the instrumental errors. The deviations from theory in n and k are less than 0.001 and the best-fit n and k determined for the sample at different wavelengths agree to this accuracy with Handbook values. We conclude that careful ellipsometric characterization can give indices of refraction to three decimal places for materials with low k.

Paper Details

Date Published: 16 January 1989
PDF: 8 pages
Proc. SPIE 0970, Properties and Characteristics of Optical Glass, (16 January 1989); doi: 10.1117/12.948178
Show Author Affiliations
S. F Nee, Naval Weapons Center (United States)
H E Bennett, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 0970:
Properties and Characteristics of Optical Glass
Alexander J. Marker, Editor(s)

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