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Proceedings Paper

Characterization Of Diamond-Like Films
Author(s): N. R. Parikh; W. K. Chu; G. S. Sandhu; M. L. Swanson; C. Childs; J. M. Mikrut; L. E. McNeil
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Paper Abstract

Thin diamond-like and diamond films, grown by remote plasma-enhanced CVD (RPECVD) and by plasma CVD, were characterized using optical microscopy, elastic recoil detection spectroscopy (ERD), and Raman scattering. The H concentration of the films was measured by ERD and was related to the growth parameters and to the quality of the films as determined by Raman scattering. The H content of samples grown by RPECVD at the Research Triangle Institute (RTI) increased with decreasing growth temperature, varying from 6 at% H at growth temperatures from 500-720°C, to 25 at% H at a growth temperature of 20°C. The characteristic Raman frequency of natural diamond, 1332 cm-1, was observed for samples grown by Crystallume Corp. and by General Electric Corp. The samples obtained from Crystallume showed circular "bull's-eye" features by optical microscopy, and the width of the 1332 cm-1 peak was broad, indicating highly strained crystallites. For a sample from G.E., most of the film was good quality diamond, as indicated by a sharp 1332 cm-1 diamond frequency; the bottom (substrate) part of the film contained more H than the top part.

Paper Details

Date Published: 17 January 1989
PDF: 11 pages
Proc. SPIE 0969, Diamond Optics, (17 January 1989); doi: 10.1117/12.948148
Show Author Affiliations
N. R. Parikh, University of North Carolina (United States)
W. K. Chu, University of North Carolina (United States)
G. S. Sandhu, University of North Carolina (United States)
M. L. Swanson, University of North Carolina (United States)
C. Childs, University of North Carolina (United States)
J. M. Mikrut, University of North Carolina (United States)
L. E. McNeil, University of North Carolina (United States)


Published in SPIE Proceedings Vol. 0969:
Diamond Optics
Albert Feldman; Sandor Holly, Editor(s)

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