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Proceedings Paper

Diamond-Like Carbon Films By RF Plasma - Enhanced Chemical Vapour Deposition
Author(s): R. S. Yalamanchi; G. K. M. Thutupalli
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Paper Abstract

Diamond-like Carbon films synthesized by RF plasma-enhanced chemical vapour deposition were systematically characterized for their structural, optical and mechanical properties. The process parameters were optimized by the use of orthogonal tables to get the 'diamond-like' properties. DLC films were demonstrated to be efficient and durable antireflection coatings for IR devices. Plasma diagnostics were carried out by Langmuir probe method and Optical Emission Actionometry for Oxygen, Air and Water plasmas to give an understanding of the DLC etch mechanism.

Paper Details

Date Published: 17 January 1989
PDF: 5 pages
Proc. SPIE 0969, Diamond Optics, (17 January 1989); doi: 10.1117/12.948138
Show Author Affiliations
R. S. Yalamanchi, ISRO Satellite Centre (India)
G. K. M. Thutupalli, ISRO Satellite Centre (India)


Published in SPIE Proceedings Vol. 0969:
Diamond Optics
Albert Feldman; Sandor Holly, Editor(s)

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