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Proceedings Paper

Laser Scatterometer
Author(s): Yi-Sheng Chen; Wen-Gui Wang
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Paper Abstract

We research and manufacture an instrument for measuring surface scattering and roughness of supersmooth surfaces. It can be used not only for measuring opaque sample but also for measuring transparent sample.

Paper Details

Date Published: 5 April 1989
PDF: 5 pages
Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); doi: 10.1117/12.948104
Show Author Affiliations
Yi-Sheng Chen, Shanghai Institute of Optics and Fine Mechanics (China)
Wen-Gui Wang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 0967:
Stray Light and Contamination in Optical Systems
Robert P. Breault, Editor(s)

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