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Proceedings Paper

Raster Area Scatter Measurements And Sample Uniformity
Author(s): J. Rifkin; J C Stover; D E. McGary; K. H. Kirchner; D J. Wilson
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Paper Abstract

Raster scan measurement of optical light scatter is described. Comparison is made of angle scan and raster scan data taken with a CASITh/RASITh scatterometer. A new technique for very fast surface scans is presented.

Paper Details

Date Published: 5 April 1989
PDF: 7 pages
Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); doi: 10.1117/12.948101
Show Author Affiliations
J. Rifkin, Toomay, Mathis & AsSociates, Inc (United States)
J C Stover, Toomay, Mathis & AsSociates, Inc (United States)
D E. McGary, Toomay, Mathis & AsSociates, Inc (United States)
K. H. Kirchner, Toomay, Mathis & AsSociates, Inc (United States)
D J. Wilson, Toomay, Mathis & AsSociates, Inc (United States)


Published in SPIE Proceedings Vol. 0967:
Stray Light and Contamination in Optical Systems
Robert P. Breault, Editor(s)

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