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Proceedings Paper

The Use Of An Optical Reference Flat To Map The Slide Position Errors Of A Coordinate Measuring Machine
Author(s): R. M. Pardue; J. B. Arnold
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Paper Abstract

A system to measure the static geometric slide errors of a Coordinate Measuring Machine is described. The system uses a 36" x 36" optical reference flat and four plane mirror interferometers to measure the six possible components of rigid-body motion of the machine probe relative to the machine table. Multiple traces are taken in each of the 3 axis directions to produce a map over the measurement volume. Error compensation techniques based on the interpolation between traces to enhance accuracy are discussed. An auxiliary method is described which is used to measure slide axis squareness. The error map is then adjusted for slide squareness. The control or compensation of sources of non-repeatability and its impact on mapping and compensation accuracy is also discussed.

Paper Details

Date Published: 29 January 1989
PDF: 11 pages
Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948066
Show Author Affiliations
R. M. Pardue, Martin-Marietta Energy Systems (United States)
J. B. Arnold, Martin-Marietta Energy Systems (United States)

Published in SPIE Proceedings Vol. 0966:
Advances in Fabrication and Metrology for Optics and Large Optics
Jones B. Arnold; Robert E. Parks, Editor(s)

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