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Proceedings Paper

Scanning CO2 Laser Interferometer For The Inspection Of Infrared Transmitting Plane Parallel Plates
Author(s): B. Dischler; P. Koidl
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Paper Abstract

A scanning CO2 laser interferometer is described, in which the test sample itself forms the interference cavity. Results for plane parallel plates of germanium and of galliumarsenide are presented and discussed. Samples with perfectly plane surfaces allow to evaluate the uniformity of the refractive index across the sample.

Paper Details

Date Published: 29 January 1989
PDF: 7 pages
Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948063
Show Author Affiliations
B. Dischler, Fraunhofer-Institut fur Angewandte Festkorperphysik (Germany)
P. Koidl, Fraunhofer-Institut fur Angewandte Festkorperphysik (Germany)


Published in SPIE Proceedings Vol. 0966:
Advances in Fabrication and Metrology for Optics and Large Optics
Jones B. Arnold; Robert E. Parks, Editor(s)

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