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Proceedings Paper

Roughness Study Of Aluminum-Coated Surfaces By Infrared Ellipsometry
Author(s): S. F. Nee; H. E. Bennett; P. T. Nee
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Paper Abstract

Ellipsometric parameters for coated aluminum surfaces with roughnesses below 10 nm were measured using an infrared ellipsometer at null operation. The two-phase model was used to fit the ellipsometric data of multiple angles of incidence at a fixed wavelength. The complex dielectric constant, the complex index of refraction, and the deviations of fitting were found to exhibit linear dependency on roughness. These linear relationships can be used to characterize roughness as well as to determine the optical constants of material without ambiguity of roughness.

Paper Details

Date Published: 27 January 1989
PDF: 10 pages
Proc. SPIE 0965, Current Developments in Optical Engineering III, (27 January 1989); doi: 10.1117/12.948011
Show Author Affiliations
S. F. Nee, Naval Weapons Center (United States)
H. E. Bennett, Naval Weapons Center (United States)
P. T. Nee, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 0965:
Current Developments in Optical Engineering III
Robert E. Fischer; Warren J. Smith, Editor(s)

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