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Proceedings Paper

Dissolution Rates Of Thin Polymer Films Using Laser Interferometry
Author(s): Ferdinand Rodriguez; Robert J. Groele; Philip D. Krasicky
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Paper Abstract

Dissolution rates are measured conveniently and accurately using a simple laser inter-ferometer. The apparatus is inexpensive and reliable and yields various kinds of information about the dissolving polymer and its interactions with the solvent or solvent mix-ture. Measurements have been made recently of the polymer of maleic anhydride with alphamethylstyrene. These can be compared with the more extensive reports of past work with poly(methylmethacrylate) and some other polymers. The dissolution process which is desirable is one which proceeds without appreciable swelling of undissolved material. Various thermodynamic anu kinetic parameters are suggested as shedding light on the proper selection of solvents to achieve the best developing systems.

Paper Details

Date Published: 18 April 1985
PDF: 7 pages
Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); doi: 10.1117/12.947809
Show Author Affiliations
Ferdinand Rodriguez, Cornell University (United States)
Robert J. Groele, Cornell University (United States)
Philip D. Krasicky, Cornell University (United States)


Published in SPIE Proceedings Vol. 0539:
Advances in Resist Technology and Processing II
Larry F. Thompson, Editor(s)

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