Share Email Print

Proceedings Paper

Atmospheric Pressure Induced Reduction Errors In Reduction Stepper Lenses
Author(s): Fred Sporon-Fiedler; John Williams
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The effect of atmospheric pressure variations on the reduction ratio of a stepper lens is discussed. Data for a 5X lens is presented which demonstrates a dependence of the reduction ratio on the atmospheric pressure. The dependence can lead to a .3 um error in the reduction of an 11 mm field. A model based on thin lens optics is also presented which predicts the observed trends. Methods of minimizing the impact of this effect are discussed.

Paper Details

Date Published: 23 July 1985
PDF: 5 pages
Proc. SPIE 0538, Optical Microlithography IV, (23 July 1985); doi: 10.1117/12.947751
Show Author Affiliations
Fred Sporon-Fiedler, Hewlett-Packard Corporation (United States)
John Williams, Hewlett-Packard Corporation (United States)

Published in SPIE Proceedings Vol. 0538:
Optical Microlithography IV
Harry L. Stover, Editor(s)

© SPIE. Terms of Use
Back to Top