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Proceedings Paper

Precision Machining Of Ceramic Materials By Excimer Laser Irradiation
Author(s): K. J. Schmatjko; G. Endres; U. Schmidt; P. H. Banz
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Paper Abstract

Excimer laser radiation with a high energy density was used for structured removal of ceramics. Patterns down to 20 μm over an extended area were generated by mask projection. For the oxides (Al203, ZrO2) a specific removal rate of 0.01 μm/(J/cm2) per pulse was determined above a threshold of 3 J/cm2, and no saturation behavior at higher energy density was observed. Non-oxidic ceramics (SiC, Si3N4, ALN, BN) show saturation at a rate close to 20 J/cm2. The short pulse ensures minimal mechanical and chemical change of the surface layer under irradiation.

Paper Details

Date Published: 24 October 1988
PDF: 8 pages
Proc. SPIE 0957, Laser Beam Surface Treating and Coating, (24 October 1988); doi: 10.1117/12.947710
Show Author Affiliations
K. J. Schmatjko, Siemens AG (Fed. Rep. Germany)
G. Endres, Siemens AG (Fed. Rep. Germany)
U. Schmidt, Siemens AG (Fed. Rep. Germany)
P. H. Banz, Siemens AG (Fed. Rep. Germany)

Published in SPIE Proceedings Vol. 0957:
Laser Beam Surface Treating and Coating
Gerd Sepold, Editor(s)

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