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Proceedings Paper

Application Of Heterodyne Nrofilometry And Digital Image Processings To The Stufiilly Of Erosion Phenomena
Author(s): C. Pieralli; G. Tribillon
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Paper Abstract

An optical heterodyne profilometer has been developped to get parameters of profiles such as roughness, skewness... Now, it is associated with image processings for automated pattern recognition. Their applications, either on calculated profiles or interference patterns, lead to features of defects on a surface. This device can be a useful tool for the study of erosion phenomena.

Paper Details

Date Published: 16 January 1989
PDF: 5 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947628
Show Author Affiliations
C. Pieralli, UFR Sciences et Techniques (France)
G. Tribillon, UFR Sciences et Techniques (France)


Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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