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Proceedings Paper

Testing Reflective Optical Surfaces With A Non-Contacting Probe
Author(s): G. Molesini; F. Quercioli; B. Tiribilli; M. Trivi
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Paper Abstract

An optical device is described that performs height data acquisition by focusing a white light beam at a sample surface and processing the backscattered light. The principle of the operation is based on longitudinal chromatic aberration of the focusing lens and on spectral analysis of the image irradiance. The surface microtopography is reconstructed after automatic point by point scanning. A personal computer interfaced to the probe controls the operation and produces the roughness parameters. Highlights of the optical approach are presented, main system characteristics are given and examples of performance on selected objects are demonstrated.

Paper Details

Date Published: 16 January 1989
PDF: 9 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947615
Show Author Affiliations
G. Molesini, Istituto Nazionale di Ottica (Italy)
F. Quercioli, Istituto Nazionale di Ottica (Italy)
B. Tiribilli, Istituto Nazionale di Ottica (Italy)
M. Trivi, Istituto Nazionale di Ottica (Italy)


Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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