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Proceedings Paper

The Development Of ESPI With View-Points Of Optical System Set-Ups
Author(s): Ming-Wen Chang
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Paper Abstract

The basics, the working principle, the advantages, and the names of ESPI are reviewed. Syntheses and analyses of the optical system set-ups, emphasizing the speckle reference ESPI, of the past and present developments are made. Future development directions are discussed. The optical system set-up requirements and techniques are listed and emphasized. Light economy analyzing method is described and Michelson-type speckle reference ESPI set-up and two other new set-ups are analyzed.

Paper Details

Date Published: 16 January 1989
PDF: 10 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947603
Show Author Affiliations
Ming-Wen Chang, National Central University (China)


Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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