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Proceedings Paper

Profilometry In The Angstrom Region
Author(s): Jacob Politch
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Paper Abstract

An interferometric system, based on heterodyne principle is described and which enables profile measurements of a surface with a high accuracy. It is possible to measure height variations of 4 Angstroms with a spatial resolution of 1 micrometer. Fran the surface height measurements, there were calculated its statistical properties, such as the R of the heights, the slopes and also its spectral density. The last one identifies the spatial frequencies of the surface, caused for example by the diamond turning mad-line and also by the measuring maChine. For an electro-magnetic wave with a Gaussian profile, which is incident the surface under test, the reflected complex field amplitude (CFA) near the focal region was calculated. jibe have defined the "Macroscopic wavelength" A, which was found to be constant for variations ▵z of the focal distance from the plane under test, for variations of the bean diameter wo in the focal region, while the complex index of refraction (CIF) of the surface under test was kept constant.

Paper Details

Date Published: 16 January 1989
PDF: 8 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947602
Show Author Affiliations
Jacob Politch, Technion I.I.T. (Israel)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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