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Proceedings Paper

High Precision And Miniaturized Mark Position Sensing Methods For 3-D Shape Measurement
Author(s): Masanori Idesawa
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Paper Abstract

A high precision mark position sensing method for image position sensing detector (PSD) with kaleido scopic mirror tunnel (KM-PSM) is introduced. To increase the image position detecting precision of a sensor element itself, hybrid ( analogue and digital ) type position sensitive device (R-HPSD) is invented. In order to realize high precision and miniaturized 3-D position measuring system, 1-D mark direction sensing method (PM-DSM) which consist of a 1-D image position sensing element, a cylindrical lens and a parallel mirror tunnel is proposed. Furtheremore, an optical range sensing method (RORS) which is suitable to realize a miniaturized optical range sensing probe based on the triangulation, is proposed. In addition, an optical range sensing probe for advanced 3-D coordinates measuring machine is considered.

Paper Details

Date Published: 16 January 1989
PDF: 8 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947600
Show Author Affiliations
Masanori Idesawa, Riken:The Institute of Physical and Chemical Research (Japan)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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