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Proceedings Paper

Interferometric Measurement Of The Roughness Of Machined Parts
Author(s): Katherine Creath; James C. Wyant
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Paper Abstract

A technique for the measurement of surface roughness using a non-contact optical profiler is presented for the measurement of surfaces having RA's of up to 2.5 μm (100 μn). The optical profiler uses phase-measurement interferometry to directly measure surface height profiles at a single wavelength of illumination. By utilizing information from surface height measurements made at two different wavelengths, surface profiles with peak-to-valleys of up to 20 gm (800 μn) can be determined. The technique presented is non-destructive, quick, and has an rms repeatability of better than 25 nm (1 μn). Results of measurements made with both linear and area detector arrays on calibrated roughness standards as well as on machined surfaces are presented.

Paper Details

Date Published: 16 January 1989
PDF: 6 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947596
Show Author Affiliations
Katherine Creath, WYKO Corporation (United States)
James C. Wyant, WYKO Corporation (United States)


Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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