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Proceedings Paper

Industrial Applications Of An Optical Profilometer
Author(s): A.J. C. Brown; U. Breitmeier
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Paper Abstract

This paper describes a commercial optical profilometer, the UB 60, and several of its industrial applications. The operating principle of the instrument is based on the dynamic focussing of a confocal microscope, a technique adapted from known CD player technology. The paper begins with a brief description of the profilometer itself, concentrating on the optical system, and then continues with a brief description of four applications. Finally some encountered measurement problems and their solutions are discussed.

Paper Details

Date Published: 16 January 1989
PDF: 8 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947590
Show Author Affiliations
A.J. C. Brown, UBM GmbH (Germany)
U. Breitmeier, UBM GmbH (Germany)


Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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