Share Email Print

Proceedings Paper

Comparison Of Optical And Mechanical Measurements Of Surface Finish
Author(s): E. L. Church; J. C. Dainty; D. M. Gale; P. Z. Takacs
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Improved signal processing procedures have been developed for determining surface microtopography from interference microscopy. These are illustrated by comparing the finish of a precision-machined surface measured with the research Linnik microscope at Imperial College with corresponding results obtained using the digitized Talystep at the National Bureau of Standards. Excellent agreement is obtained.

Paper Details

Date Published: 16 January 1989
PDF: 11 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947589
Show Author Affiliations
E. L. Church, USA ARDEC (United States)
J. C. Dainty, Imperial College (United Kingdom)
D. M. Gale, Imperial College (United Kingdom)
P. Z. Takacs, Brookhaven National Laboratory (United States)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

© SPIE. Terms of Use
Back to Top